학술논문

H2O2:HF:C4O6H6 (Tartaric Acid):H2O Etching System for Chemical Polishing of GaSb
Document Type
Article
Source
In: Journal of the Electrochemical Society. (Journal of the Electrochemical Society, October 1995, 142(10):L189-L191)
Subject
Language
English
ISSN
19457111
00134651