학술논문
A Novel Approach of Utilizing Mechanically Flexible SiC Substrate to Grow Crack-Free AlN Bulk Crystal by Thermal Strain Relaxation Functionality
Document Type
Conference Paper
Author
Source
In: Silicon Carbide and Related Materials 2021- Selected peer-reviewed extended papers abstracts of which were presented at the 13th European Conference on Silicon Carbide and Related Materials, ECSCRM 2021 . (Materials Science Forum, 2022, 1062 MSF:28-32)
Subject
Language
English
ISSN
16629752
02555476
02555476