학술논문
The Effect of Annealing Thin Film Parylene C-Platinum Interfaces Characterized by Broadband Dielectric Spectroscopy
Document Type
Conference Paper
Author
Source
In: 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 , 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, 20 June 2021, :884-887)
Subject
Language
English