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Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films

Document Type

Article

Author

Karimi Aghda, S.; Holzapfel, D.M.; Mráz, S.; Bogdanovski, D.; Fidanboy, G.; Hans, M.; Schneider, J.M.; Music, D.; Unutulmazsoy, Y.; Anders, A.; Primetzhofer, D.; Méndez, A.S.J.

Source

In: Acta Materialia. (Acta Materialia, 15 May 2023, 250)

Subject

Language

English

ISSN

13596454

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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