학술논문
Development of cap-free sputtered GeTe films for inline phase change switch based RF circuits
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures . (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, July 2014, 32(4))
Subject
Language
English
ISSN
10711023