학술논문
MmWave and sub-THz technology development in intel 22nm FinFET (22FFL) process
Document Type
Conference Paper
Author
Yu, Q.; Rami, S.; Waldemer, J.; Ma, Y.; Neeli, V.; Garrett, J.; Liu, G.; Koo, J.; Marulanda, M.; Morarka, S.; Ravikumar, S.; Yeh, Y.-S.; Chou, J.; Brown, T.; Rane, T.; Nieva, C.; Ali, D.; Joglekar, S.; Armstrong, M.; Wahl, J.; Paulson, L.; Dogiamis, G.; Lee, H.-J.; Fu, H.; Sell, B.; Karl, E.; Zhang, Y.; Monroe, N.; Han, R.
Source
In: Technical Digest - International Electron Devices Meeting, IEDM , 2020 IEEE International Electron Devices Meeting, IEDM 2020. (Technical Digest - International Electron Devices Meeting, IEDM, 12 December 2020, 2020-December:17.4.1-17.4.4)
Subject
Language
English
ISSN
01631918