학술논문
Sputtering and structural modifications induced in silicon dioxide (SiO2 ) thin films under (10–40 MeV) Auq+ heavy ion irradiation
Document Type
Article
Author
Source
In: Surface and Interface Analysis . (Surface and Interface Analysis, December 2023, 55(12):899-908)
Subject
Language
English
ISSN
10969918
01422421
01422421