학술논문
Fully-Integrated System-In-Package device for drive, sense, and control of MEMS μmirrors for Raster Scan Projection
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , MOEMS and Miniaturized Systems XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12013)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X