학술논문
A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler
Document Type
Article
Author
Source
In: IEICE Transactions on Electronics . (IEICE Transactions on Electronics, September 2023, E106.C(9):486-490)
Subject
Language
English
ISSN
17451353
09168524
09168524