학술논문

Elaboration of 1 μm square arrays of octadecyltrimethoxysilane monolayers on SiO/2Si by combining chemical vapour deposition and nano-imprint lithography
Document Type
Article
Source
In: Superlattices and Microstructures, European Materials Research Society 2004. (Superlattices and Microstructures, July 2004, 36(1-3):227-233)
Subject
Language
English
ISSN
07496036