학술논문
Polarization and Reliability Enhancement for Ferroelectric Capacitors by Interface Engineering Through Crystalline TaN
Document Type
Article
Author
Source
In: IEEE Transactions on Electron Devices . (IEEE Transactions on Electron Devices, 1 May 2024, 71(5):3433-3438)
Subject
Language
English
ISSN
15579646
00189383
00189383