학술논문
Silicon nitride thin film for optofluidic sensor application
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Sensors 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12572)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X