학술논문
Characterization Study of Silicon Nitride (SiN) thin film hydrogen bonding for waveguide application
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Silicon Photonics XVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12426)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X