학술논문
Understanding ion and atom fluxes during high-power impulse magnetron sputtering deposition of NbCx films from a compound target
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 December 2023, 41(6))
Subject
Language
English
ISSN
15208559
07342101
07342101