학술논문
Heteroepitaxial growth of Ga2 O3 on 4H-SiC by liquid-injection MOCVD for improved thermal management of Ga2 O3 power devices
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 July 2023, 41(4))
Subject
Language
English
ISSN
15208559
07342101
07342101