학술논문
Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride
Document Type
Article
Author
Source
In: Journal of Micromechanics and Microengineering . (Journal of Micromechanics and Microengineering, January 2024, 34(1))
Subject
Language
English
ISSN
13616439
09601317
09601317