학술논문
Development of SiGe Indentation Process Control to Enable Stacked Nanosheet FET Technology
Document Type
Conference Paper
Author
Source
In: ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings , 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2020. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, August 2020, 2020-August)
Subject
Language
English
ISSN
10788743