학술논문
Piezoelectric Sensors Operating at Very High Temperatures and in Extreme Environments Made of Flexible Ultrawide-Bandgap Single-Crystalline AlN Thin Films
Document Type
Article
Author
Source
In: Advanced Functional Materials . (Advanced Functional Materials, 2 March 2023, 33(10))
Subject
Language
English
ISSN
16163028
1616301X
1616301X