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Dielectric material options for integrated capacitors

Document Type

Article

Author

Ruhl, G.; Lehnert, W.; Lukosius, M.; Wenger, C.; Kaynak, C.B.; Blomberg, T.; Haukka, S.; Baumann, P.K.; Besling, W.; Roest, A.; Riou, B.; Lhostis, S.; Halimaou, A.; Roozeboom, F.; Langereis, E.; Kessels, W.M.M.; Zauner, A.; Rushworth, S.

Source

In: ECS Journal of Solid State Science and Technology. (ECS Journal of Solid State Science and Technology, 2014, 3(8):N120-N125)

Subject

Language

English

ISSN

21628777
21628769

Online Access

Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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