학술논문
Development of Band-Limitless Demodulation Method for Sinusoidal Phase Modulation Interferometry (Evaluation of Noise Floors' Maximum Measurement Speeds and Resolutions)
Document Type
Article
Author
Source
In: Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering . (Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 2024, 90(1):153-158)
Subject
Language
English
Japanese
Japanese
ISSN
09120289