학술논문
Impact of high-power impulse magnetron sputtering pulse width on the nucleation, crystallization, microstructure, and ferroelectric properties of hafnium oxide thin films
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 March 2024, 42(2))
Subject
Language
English
ISSN
15208559
07342101
07342101