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Ecofriendly silicon dioxide chemical vapor deposition for semiconductor devices using nitrogen monoxide gas source

Document Type

Article

Author

Jeong, Y.; Nguyen, M.P.; Song, J.-K.; Kim, Y.-S.; Pham, D.P.; Chung, Y.-B.; Jeon, W.-S.; Jo, J.; Kim, Y.; Yi, J.

Source

In: Optical Materials. (Optical Materials, February 2024, 148)

Subject

Language

English

ISSN

09253467

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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