학술논문
Effect of focus ring with external circuit on cathode edge sheath dynamics in a capacitively coupled plasma
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 May 2023, 41(3))
Subject
Language
English
ISSN
15208559
07342101
07342101