학술논문
PLASMA DIAGNOSTICS AND STRUCTURE OF PLASMA POLYMER OF TETRAMETHYLSILANE.
Document Type
Conference Paper
Author
Source
In: Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Material . (Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Material, 1987, 56:505-509)
Subject
Language
English
ISSN
07430515