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Silver Thin-Film Electrodes Grown by Low-Temperature Plasma-Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure

Document Type

Article

Author

Hasselmann, T.; Misimi, B.; Haeger, T.; Zimmermann, F.; Brinkmann, K.O.; Theirich, D.; Heiderhoff, R.; Riedl, T.; Boysen, N.; Zanders, D.; Wree, J.-L.; Devi, A.; Rogalla, D.; Schädler, S.

Source

In: Advanced Materials Technologies. (Advanced Materials Technologies, 10 January 2023, 8(1))

Subject

Language

English

ISSN

2365709X

Online Access

Full Text (Wiley Journals) Full Text (Wiley-DB) Web of Science JCR 저널정보 Scopus Find it@PNU

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