학술논문
Characterization of surface texture-measuring optical microscopes using a binary pseudo-random array standard
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Interferometry XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12223)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X