학술논문
Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B . (Journal of Vacuum Science and Technology B, 1 January 2023, 41(1))
Subject
Language
English
ISSN
21662754
21662746
21662746