학술논문
Selectivity switch concept in Cu chemical mechanical planarization and its implementation on orbital tools
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures . (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 1999, 17(5):2262-2271)
Subject
Language
English
ISSN
10711023