학술논문
Manufacturing Challenges of Czochralski Growth and Fabrication of 2-inch Semi-Insulating β-Ga2 O3 Substrates
Document Type
Conference Paper
Author
Source
In: 2022 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2022 , 2022 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2022. (2022 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2022, 2022, :291-294)
Subject
Language
English