학술논문

Growth of 50mm beta-gallium oxide (β-Ga2O3) substrates
Document Type
Conference Paper
Source
In: CS MANTECH 2018 - 2018 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2018 - 2018 International Conference on Compound Semiconductor Manufacturing Technology. (CS MANTECH 2018 - 2018 International Conference on Compound Semiconductor Manufacturing Technology, 2018)
Subject
Language
English