학술논문
A Comparative Study of Pt/Al0.72 Sc0.28 N/Pt-Based Thin-Film Metal-Ferroelectric-Metal Capacitors on GaN and Si Substrates
Document Type
Article
Source
In: ACS Applied Materials and Interfaces . (ACS Applied Materials and Interfaces, 6 September 2023, 15(35):41606-41613)
Subject
Language
English
ISSN
19448252
19448244
19448244