학술논문

Fabrication of Highly n-Type-Doped Germanium Nanowires and Ohmic Contacts Using Ion Implantation and Flash Lamp Annealing
Document Type
Article
Source
In: ACS Applied Electronic Materials. (ACS Applied Electronic Materials, 22 November 2022, 4(11):5256-5266)
Subject
Language
English
ISSN
26376113