학술논문
Oven-controlled pressure sensor and its Mechanical aging
Document Type
Conference Paper
Source
In: Journal of Physics: Conference Series , 20th Annual Conference and 9th International Conference of Chinese Society of Micro-Nano Technology. (Journal of Physics: Conference Series, 10 September 2019, 1209(1))
Subject
Language
English
ISSN
17426596
17426588
17426588