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Polishing of AIN/sapphire substrates obtained by thermochemical nitridation of sapphire

Document Type

Article

Author

Vovk, E.A.; Budnikov, A.T.; Nizhankovskyi, S.V.; Kryvonogov, S.I.; Krukhmalev, A.A.; Dobrotvorskaya, M.V.

Source

In: Functional Materials. (Functional Materials, 2013, 20(2):253-258)

Subject

Language

English

ISSN

22182993
10275495

Online Access

Open Access (EBSCO) Web of Science JCR 저널정보 Scopus Find it@PNU

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