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Study of silicon surface passivation by ZnOx/AlOx stack prepared using super-cycle approach in thermal ALD process

Document Type

Article

Author

Kumar, A.; Devi, M.; Tomer, S.; Pathi, P.; Vandana; Dutta, M.

Source

In: Surfaces and Interfaces. (Surfaces and Interfaces, April 2024, 47)

Subject

Language

English

ISSN

24680230

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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