학술논문

Mapping Analysis of Crystalline Perfection and UV-C Transparency of 2-in. Aluminum Nitride Substrates Grown by Physical Vapor Transport
Document Type
Article
Source
In: Physica Status Solidi (B) Basic Research. (Physica Status Solidi (B) Basic Research, 2023)
Subject
Language
English
ISSN
15213951
03701972