학술논문
Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics . (Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 1 March 2019, 37(2))
Subject
Language
English
ISSN
21662754
21662746
21662746