학술논문
Shallow junction formation by decaborane molecular ion implantation
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures . (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, January 2000, 18(1):445-449)
Subject
Language
English
ISSN
10711023