학술논문
Status and Performance of Integration Modules Toward Scaled CMOS with Transition Metal Dichalcogenide Channel
Document Type
Conference Paper
Author
Chou, A.-S.; Hsu, C.-H.; Lin, Y.-T.; Arutchelvan, G.; Chen, E.; Hung, T.Y.T.; Hsu, C.-F.; Chou, S.-A.; Lee, T.-E.; Su, Y.-C.; Wang, J.-F.; Chung, Y.-Y.; Wu, W.-C.; Yun, W.-S.; Wong, H.-S.P.; Cheng, C.-C.; Radu, I.P.; Hsu, Y.-W.; Hsu, M.-C.; Hou, F.-R.; Wu, C.-I.; Madia, O.; Doornbos, G.; Cai, J.; Van Dal, M.; Shen, Y.-Y.; Chang, W.-H.; Azizi, A.; Neilson, K.; Sathaiya, D.M.; Wu, C.-C.; Wu, J.; Chien, C.-H.
Source
In: Technical Digest - International Electron Devices Meeting, IEDM , 2023 International Electron Devices Meeting, IEDM 2023. (Technical Digest - International Electron Devices Meeting, IEDM, 2023)
Subject
Language
English
ISSN
01631918