학술논문
A High-Flux Compact X-ray Free-Electron Laser for Next-Generation Chip Metrology Needs
Document Type
Article
Author
Rosenzweig, J.B.; Andonian, G.; Bosco, F.; Fukasawa, A.; Lawler, G.; Manwani, P.; Miao, J.; Musumeci, P.; O’Tool, S.; Sakai, Y.; Williams, O.; Yadav, M.; Agustsson, R.; Araujo, A.; Kutsaev, S.; Murokh, A.; Anisimov, P.M.; Kim, D.; Simakov, E.I.; Xu, H.; Carillo, M.; Chiadroni, E.; Migliorati, M.; Mostacci, A.; Palumbo, L.; Giannessi, L.; Spataro, B.; Huang, Z.; Li, Z.; Majernik, N.; Nanni, E.; Robles, R.; Singleton, M.; Tang, J.; Tantawi, S.; Maxson, J.
Source
In: Instruments . (Instruments, March 2024, 8(1))
Subject
Language
English
ISSN
2410390X