학술논문
Tunable defect engineering of Mo/TiON electrode in angstrom-laminated HfO2 /ZrO2 ferroelectric capacitors towards long endurance and high temperature retention
Document Type
Article
Author
Source
In: Nanotechnology . (Nanotechnology, 13 May 2024, 35(20))
Subject
Language
English
ISSN
13616528
09574484
09574484