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Electromagnetic analysis for optical coherence tomography based through silicon vias metrology

Document Type

Article

Author

Iff, W.A.; Hugonin, J.-P.; Sauvan, C.; Besbes, M.; Chavel, P.; Herth, E.; Coste, P.; Bosseboeuf, A.; Vienne, G.; Milord, L.; Alliata, D.

Source

In: Applied Optics. (Applied Optics, 20 September 2019, 58(27):7472-7488)

Subject

Language

English

ISSN

21553165
1559128X

Online Access

Full Text (OSA) Web of Science JCR 저널정보 Scopus Find it@PNU

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