학술논문
Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8
Document Type
Conference Paper
Author
Source
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2024, :871-874)
Subject
Language
English
ISSN
10846999