학술논문
Measurement of thin-film stress, stiffness, and strength using an enhanced membrane pressure-bulge technique
Document Type
Conference Paper
Author
Source
In: Materials Research Society Symposium - Proceedings , Thin Films - Stresses and Mechanical Properties X. (Materials Research Society Symposium - Proceedings, 2003, 795:405-410)
Subject
Language
English
ISSN
02729172