학술논문
Laser-Lift-Off of GaN-based transistors with an ultra-short-pulsed deep UV laser
Document Type
Conference Paper
Source
In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE , Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 2024, 12872)
Subject
Language
English
ISSN
16057422