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Hydrogen and nitrogen loss during ERD analysis of silicon (oxy)nitrides

Document Type

Article

Author

Wallace, S.G.; Kockelkoren, A.C.; Boudreau, M.G.; Mascher, P.; Forster, J.S.; Davies, J.A.

Source

(Materials Science Forum, 1997, 248-249:381-384)

Subject

Language

English

ISSN

16629752
02555476

Online Access

Scopus Find it@PNU

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