학술논문
Tribological properties of thin films made by atomic layer deposition sliding against silicon
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 January 2018, 36(1))
Subject
Language
English
ISSN
15208559
07342101
07342101