학술논문
Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation
Document Type
Article
Author
Source
In: Journal of Micro/Nanolithography, MEMS, and MOEMS . (Journal of Micro/Nanolithography, MEMS, and MOEMS, January 2014, 13(1))
Subject
Language
English
ISSN
19325134
19325150
19325150