학술논문

Optimization of a 65 nm CMOS imaging process for monolithic CMOS sensors for high energy physics
Document Type
Conference Paper
Author
Rinella, G.A.Ballabriga, R.Bialas, W.Borghello, G.Braach, J.Buschmann, E.Campbell, M.Carnesecchi, F.Cecconi, L.Dannheim, D.Dort, K.de Melo, J.Deng, W.Di Mauro, A.Dorda Martin, A.Dorosz, P.Hasenbichler, J.Hillemanns, H.Junique, A.Kremastiotis, I.Kluge, A.Kucharska, G.Kugathasan, T.Lautner, L.Leitao, P.Mager, M.Martinengo, P.Munker, M.Musa, L.Piro, F.Rebane, K.Reidt, F.Sanna, I.Snoeys, W.Svihra, P.Suljic, M.Termo, G.Van Beelen, J.B.Nakamura, M.Suzuki, M.Takahashi, N.Fenigstein, A.Haim, A.Toledano, E.De Robertis, G.Loddo, F.La Rocca, P.Triffiro, A.Marras, D.Sarritzu, V.Usai, G.Benotto, F.Beole, S.Ferrero, C.Lim, B.-H.Perciballi, S.Prino, F.Savino, U.Turcato, A.Antonelli, M.Baccomi, R.Buckland, M.Camerini, P.Contin, G.Rachevski, S.Villani, A.Ricci, R.Barbero, M.Barrillon, P.Fougeron, D.Habib, A.Pangaud, P.Baudot, J.Bertolone, G.Besson, A.Bugiel, S.Colledani, C.Dorokhov, A.El Bitar, Z.Fang, X.Goffe, M.Hu, C.Jaaskelainen, K.Morel, F.Pham, H.Senyukov, S.Soudier, J.Valin, I.Gajanana, D.Grelli, A.Gromov, V.Kluit, R.Russo, R.Sonneveld, J.Vitkovskiy, A.Yelkenci, A.Becht, P.Masciocchi, S.Menzel, M.W.Schledewitz, D.Soltveit, H.K.Stachel, J.Yuncu, A.Andronic, A.Tiltmann, N.Chauhan, A.Hansen, K.Mulyanto, B.Reckleben, C.Isakov, A.Kotliarov, A.Krizek, F.Mathew, S.Sedgwick, I.Gonella, L.Eberwein, G.Charbon, E.Hong, G.H.Kwon, Y.Vassilev, M.D.Vernieri, C.Wu, Y.
Source
In: Proceedings of Science, 10th International Workshop on Semiconductor Pixel Detectors for Particles and Imaging, Pixel 2022. (Proceedings of Science, 8 May 2023, 420)
Subject
Language
English
ISSN
18248039