학술논문
Atomic layer deposition of 2D and 3D standards for synchrotron-based quantitative composition and structure analysis methods
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 March 2018, 36(2))
Subject
Language
English
ISSN
15208559
07342101
07342101